Optical modulation spectroscopy of hydrogenated microcrystalline silicon

Electronic transport in hydrogenated microcrystalline silicon: similarities with amorphous silicon

Undoped hydrogenated microcrystalline silicon (lc-Si:H) layers were grown by the very high frequency glow discharge (VHF-GD) technique under various deposition conditions. The electronic transport properties under illumination were investigated by means of steady-state photoconductivity and steady-state photocarrier grating methods. Similarly to hydrogenated amorphous silicon (a-Si:H), power la...

Optical properties of hydrogenated amorphous silicon

The influence of change in silane concentration and substrate temperature on optical properties of hydrogenated microcrystalline silicon films

The influence of change in deposition conditions of silane concentration and substrate temperature on optical properties of hydrogenated microcrystalline silicon thin film samples prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique, are investigated. The crystalline volume fraction for the samples determined from Raman spectra are correlated with the silane concentration, su...

Thermal Desorption Spectroscopy of Hydrogen from Amorphous Hydrogenated Silicon

T h e r m a l desorption spectroscopy (TDS) based on the mass spectroscopy of thermal ly evolved hydrogen is used for desorption analysis of amorphous hydrogenated silicon (a-Si:H). Two series of glow discharge chemical vapour deposited a-Si:H were investigated by the T D S method . Cons tan t t e m p e r a t u r e growth ra te enabled to determine t empera tu re regions of hydrogen evolution a...

Determination of Raman emission cross-section ratio in hydrogenated microcrystalline silicon

The determination of the crystalline volume fraction from the Raman spectra of microcrystalline silicon involves the knowledge of a material parameter called the Raman emission cross-section ratio y. This value is still debated in the literature. In the present work, the determination of y has been carried out on the basis of quantitative analysis of medium-resolution transmission electron micr...